Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same

Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same

US Patent 11490499 · Granted Nov 1, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus for arcing diagnosis, plasma process equipment including the same, and2025
Semiconductor measurement apparatus2025
Semiconductor measurement apparatus2025
Level sensor and substrate processing apparatus including the same2025
Method of cleaning collector of EUV light source system2024
Hyperspectral imaging (HSI) apparatus and inspection apparatus including the sam2024
Apparatus and method for treating substrate2023
Extreme ultraviolet (EUV) collector inspection apparatus and method2023
Semiconductor memory device2022
Integrated circuit devices2022
X-ray system, semiconductor package, and tray having X-ray absorption filter2022
Extreme ultraviolet generation apparatus2021