Ion source with tubular cathode

Assignee

• Applied Materials

Inventors

• Bon-Woong Koo (78 patents)
• Svetlana B. Radovanov (54 patents)
• Frank Sinclair (139 patents)
• You Chia Li (5 patents)
• Peter Ewing (9 patents)
• Ajdin Sarajlic (4 patents)
• Christopher A. Rowland (42 patents)
• Nunzio V. Carbone (4 patents)

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