Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma corrision resistive heater for high temperature processing

Plasma corrision resistive heater for high temperature processing

US Patent 11299805 · Granted Apr 12, 2022

Estimated economic value: $58,287,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for tag-directed deep-learning-based features for predicting e2025
Systems and methods for deposition residue control2025
AFE (active far edge) heater/bipolar ESC with simplified and optimized structure2025
Showerhead design to control stray deposition2025
Decompression toy2025
Data storage method and flash device for allocating a physical address based on 2025
Chamber configurations and processes for particle control2025
Multi-antenna unit for large area inductively coupled plasma processing apparatu2025
Impedance control of local areas of a substrate during plasma deposition thereon2025
Local dimming drive circuit, method, system and electronic equipment2025
All-metal dissolvable ball seat for self-compensating fracturing2025
Uniform in situ cleaning and deposition2025