UV laser slicing of β-Ga2O3 by micro-crack generation and propagation

Assignee

• US Navy

Inventors

• Nadeemullah A. Mahadik (5 patents)
• Robert E. Stahlbush (10 patents)
• Marko J. Tadjer (26 patents)
• Karl D. Hobart (72 patents)
• Francis J. Kub (98 patents)

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