Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method

Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method

US Patent 11150565 · Granted Oct 19, 2021

Estimated economic value: $71,098,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for optimizing a sampling scheme and associated apparatuses2025
Device manufacturing method2023
System and method for measurement of alignment2022
System and method for measurement of alignment2022
Method and apparatus to correct for patterning process error2021
Methods for controlling lithographic apparatus, lithographic apparatus and devic2020
Methods for controlling lithographic apparatus, lithographic apparatus and devic2020
Method for adjusting actuation of a lithographic apparatus2020
Methods for controlling lithographic apparatus, lithographic apparatus and devic2020
Methods for controlling lithographic apparatus, lithographic apparatus and devic2019
Method of sequencing lots for a lithographic apparatus2019
Methods for controlling lithographic apparatus, lithographic apparatus and devic2019