Ion beam etching apparatus

Assignee

• Research & Business Foundation Sungkyunkwan University

Inventors

• Geun-Young Yeom (25 patents)
• Jin-Woo Park (439 patents)
• Doo San KIM (5 patents)
• Jong Sik Oh (2 patents)
• Da In SUNG (2 patents)
• You Jin JI (6 patents)
• Won Oh Lee (11 patents)
• Mu Kyeom MUN (2 patents)
• Kyung Chae Yang (2 patents)
• Ki Seok Kim (82 patents)
• Ji-Soo Oh (13 patents)
• Ki Hyun Kim (266 patents)

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