Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817291 | Faraday shield and apparatus for treating substrate | — | 2023-11-14 |
| 11120975 | Ion beam etching apparatus | Geun-Young Yeom, Jin-Woo Park, Doo San KIM, Jong Sik Oh, Da In SUNG +6 more | 2021-09-14 |