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Home › In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates

In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates

US Patent 11065654 · Granted Jul 20, 2021

Estimated economic value: $260,622,000 ⓘ

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