Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gap fill using carbon-based films

Gap fill using carbon-based films

US Patent 11049716 · Granted Jun 29, 2021

Estimated economic value: $192,135,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Modulated atomic layer deposition2025
Reducing intralevel capacitance in semiconductor devices2025
Impurity reduction in silicon-containing films2025
Plasma-enhanced deposition of film stacks2025
Low stress films for advanced semiconductor applications2025
Polyimide film and manufacturing method thereof2025
Gapfill of variable aspect ratio features with a composite PEALD and PECVD metho2025
Bubble defect reduction2025
Digital safety and account discovery2025
Consumer threat intelligence service2024
Authenticating devices via tokens and verification computing devices2024
Method for providing doped silicon using a diffusion barrier layer2024