Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures

Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures

US Patent 11041816 · Granted Jun 22, 2021

Estimated economic value: $64,465,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for predicting process information with a parameterized model2025
Method and system for predicting process information with a parameterized model2025
Method for determining defectiveness of pattern based on after development image2025
Inspection apparatus and inspection method2025
Method for applying a deposition model in a semiconductor manufacturing process2025
Method and apparatus for predicting substrate image2025
Method and apparatus for predicting substrate image2025
Aligning a distorted image2025
Method for decision making in a semiconductor manufacturing process2025
Metrology targets2024
Method and apparatus for image analysis2023
Inspection apparatus and inspection method2023