Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus

Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus

US Patent 11035034 · Granted Jun 15, 2021

Estimated economic value: $48,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Film deposition method2025
Wafer processing method2025
Rectifying plate, fluid-introducing apparatus, and film-forming apparatus2024
Susceptor cover2024
Susceptor ring2024
Vapor phase growth apparatus and vapor phase growth method2023
Vapor phase growth method2022
Vapor phase growth apparatus and vapor phase growth method2022
Epitaxial film forming method, sputtering apparatus, manufacturing method of sem2020
Plasma CVD apparatus and vacuum treatment apparatus2020
Transmission2020
Film forming apparatus and film forming method2019