Rectifying plate, fluid-introducing apparatus, and film-forming apparatus

Assignee

• Kabushiki Kaisha Toshiba
• Nuflare Technology

Inventors

• Yuki FURUTANI (5 patents)
• Yoshiaki DAIGO (14 patents)
• Takuto Umetsu (14 patents)
• Shun Haruyama (1 patents)
• Keiko Shiozawa (1 patents)

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