Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Detection device for detecting a structure on an area portion of a lithography mask, and apparatus comprising a detection device of this type

Detection device for detecting a structure on an area portion of a lithography mask, and apparatus comprising a detection device of this type

US Patent 11029259 · Granted Jun 8, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for characterizing a microlithographic mask2024
Method for detecting an object structure and apparatus for carrying out the meth2024
Method for measuring a substrate for semiconductor lithography2024
Apparatus and method for a scanning probe microscope2023
Method and apparatus for characterizing a microlithographic mask2023
Apparatus and method for a scanning probe microscope2022
Device and method for characterizing a microlithographic mask2021
Device and method for characterizing a microlithographic mask2021
Method for detecting a structure of a lithography mask and device for carrying o2021
Method and device for characterizing a mask for microlithography2020
Method for three-dimensionally measuring a 3D aerial image of a lithography mask2020
Imaging optical unit for a metrology system for examining a lithography mask2020