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Home › Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components

Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components

US Patent 10941303 · Granted Mar 9, 2021

Estimated economic value: $63,182,000 ⓘ

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