Semiconductor device manufacturing method

Assignee

• Tokyo Electron Limited
• Imec Vzw

Inventors

• Koichi Yatsuda (20 patents)
• Tatsuya Yamaguchi (105 patents)
• Yannick Feurprier (16 patents)
• Frederic Lazzarino (13 patents)
• Jean-Francois de Marneffe (9 patents)
• Khashayar Babaei Gavan (3 patents)

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