Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › HHG source, inspection apparatus and method for performing a measurement

HHG source, inspection apparatus and method for performing a measurement

US Patent 10816906 · Granted Oct 27, 2020

Estimated economic value: $43,269,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Metrology method for measuring an etched trench and associated metrology apparat2025
Metrology method for measuring an etched trench and associated metrology apparat2025
Generating an alignment signal based on local alignment mark distortions2025
Call prompt method, call device, readable storage medium, and chip system2025
Method and apparatus to determine a patterning process parameter2025
Substrate comprising a target arrangement, and associated at least one patternin2025
Metrology method, target and substrate2025
Metrology apparatus based on high harmonic generation and associated method2025
Metrology apparatus based on high harmonic generation and associated method2025
Method of determining a characteristic of a structure, and metrology apparatus2025
Metrology systems, coherence scrambler illumination sources and methods thereof2025
Metrology system and method for determining a characteristic of one or more stru2025