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Home › Gas cooled electrostatic chuck (ESC) having a gas channel formed therein and coupled to a gas box on both ends of the gas channel

Gas cooled electrostatic chuck (ESC) having a gas channel formed therein and coupled to a gas box on both ends of the gas channel

US Patent 10781518 · Granted Sep 22, 2020

Estimated economic value: $43,360,000 ⓘ

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