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Home › Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

US Patent 10774419 · Granted Sep 15, 2020

Estimated economic value: $9,695,000 ⓘ

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