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Home › Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

US Patent 10087520 · Granted Oct 2, 2018

Estimated economic value: $5,814,000 ⓘ

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