Defect observation device

Assignee

• Hitachi High-Technologies

Inventors

• Yuko Otani (18 patents)
• Yohei Minekawa (18 patents)
• Unknown
• Nobuhiko KANZAKI (3 patents)
• Takehiro Hirai (86 patents)
• Unknown
• Yuya Isomae (4 patents)
• Kaori Yaeshima (1 patents)
• Yuji Takagi (198 patents)

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