Film forming apparatus

Assignee

• Nuflare Technology

Inventors

• Kunihiko Suzuki (209 patents)
• Naohisa Ikeya (5 patents)
• Masayoshi Yajima (8 patents)
• Kazukuni Hara (25 patents)
• Hiroaki Fujibayashi (15 patents)
• Hideki Matsuura (29 patents)
• Katsumi Suzuki (166 patents)

View full patent text on Google Patents →