Light-irradiation heat treatment method and heat treatment apparatus

Assignee

• Screen Holdings Co.

Inventors

• Takayuki Aoyama (28 patents)
• Yasuaki Kondo (13 patents)
• Shinji Miyawaki (5 patents)
• Shinichi Kato (291 patents)
• Kazuhiko Fuse (48 patents)
• Hideaki Tanimura (18 patents)
• Akitsugu Ueda (10 patents)
• Hikaru Kawarazaki (20 patents)
• Masashi Furukawa (30 patents)

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