Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Silicon-containing coating agent for reversing planarization pattern

Silicon-containing coating agent for reversing planarization pattern

US Patent 10508174 · Granted Dec 17, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Film-forming composition2025
Film-forming composition2025
Resist underlayer film-forming composition using carbon-oxygen double bond2025
Composition for resist pattern metallization process2025
Composition for resist pattern metallization process2025
Resist underlayer film-forming composition2025
Resist underlayer film-forming composition2025
Resist underlayer film-forming composition2025
Silicon-containing resist underlayer film-forming composition including organic 2025
Film-forming composition2025
Coating composition for pattern inversion2024
Coating composition for pattern inversion2024