Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Patterning device cooling system and method of thermally conditioning a patterning device

Patterning device cooling system and method of thermally conditioning a patterning device

US Patent 10495986 · Granted Dec 3, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Metrology method, target and substrate2025
Methods and apparatus for obtaining diagnostic information relating to an indust2025
Apparatus and method for property joint interpolation and prediction2025
Method for adjusting a target feature in a model of a patterning process based o2025
Device manufacturing methods2024
Method to label substrates based on process parameters2024
Methods and apparatus for obtaining diagnostic information relating to an indust2024
Method for determining root cause affecting yield in a semiconductor manufacturi2023
Methods of determining corrections for a patterning process, device manufacturin2023
Method of obtaining measurements, apparatus for performing a process step, and m2023
Lithographic apparatus2023
Method to predict yield of a device manufacturing process2023