Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Li Jin (12 patents)
- Li Hui Lu (8 patents)
- Chun Chao Fei (4 patents)
- Po Yuan Chiang (5 patents)
- Ya Ping Wang (9 patents)
US Patent 10446474 · Granted Oct 15, 2019