Substrate transfer device and bonding system

Assignee

• Tokyo Electron Limited

Inventors

• Masataka Matsunaga (8 patents)
• Takahiro Masunaga (5 patents)
• Takashi Koga (19 patents)
• Yasuharu Iwashita (8 patents)
• Shingo Katsuki (3 patents)
• Masaaki Umitsuki (3 patents)
• Kazutoshi Ishimaru (5 patents)
• Fumio Sakata (6 patents)

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