Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Determining a malfunctioning device in a plasma system

Determining a malfunctioning device in a plasma system

US Patent 10319570 · Granted Jun 11, 2019

Estimated economic value: $96,361,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multiple-output radiofrequency matching module and associated methods2025
Methods and apparatus for controlling plasma in a plasma processing system2025
Methods and apparatus for controlling plasma in a plasma processing system2025
Systems and methods for tuning a MHz RF generator within a cycle of operation of2025
Sensor data compression in a plasma tool2025
Tuning voltage setpoint in a pulsed RF signal for a tunable edge sheath system2024
Multiple-output radiofrequency matching module and associated methods2024
Systems and methods for tuning a MHz RF generator within a cycle of operation of2024
Methods and apparatus for controlling plasma in a plasma processing system2023
Methods and apparatus for controlling plasma in a plasma processing system2023
Adjustment of power and frequency based on three or more states2022
Adjustment of power and frequency based on three or more states2022