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Home › Supercritical carbon dioxide process for low-k thin films

Supercritical carbon dioxide process for low-k thin films

US Patent 10283344 · Granted May 7, 2019

Estimated economic value: $13,988,000 ⓘ

Assignee

Applied Materials

Inventors

Steven Verhaverbeke (136 patents)
Han-Wen Chen (49 patents)
Roman Gouk (49 patents)
Kurtis Leschkies (35 patents)

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