Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optimizing computational efficiency by multiple truncation of spatial harmonics

Optimizing computational efficiency by multiple truncation of spatial harmonics

US Patent 10185303 · Granted Jan 22, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Full beam metrology for x-ray scatterometry systems2025
Optical metrology tool equipped with modulated illumination sources2024
Full beam metrology for x-ray scatterometry systems2022
Visualization of three-dimensional semiconductor structures2021
Optimizing computational efficiency by multiple truncation of spatial harmonics2021
Methods and systems for characterization of an x-ray beam with high spatial reso2021
Optical metrology tool equipped with modulated illumination sources2021
Visualization of three-dimensional semiconductor structures2020
Full beam metrology for X-ray scatterometry systems2020
Hybrid metrology for patterned wafer characterization2020
Phase revealing optical and X-ray semiconductor metrology2020
Optical metrology tool equipped with modulated illumination sources2019