Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high k at channel

Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high k at channel

US Patent 10163630 · Granted Dec 25, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus to determine relative location using GNSS carrier phase2025
Methods and apparatus for enhancing selectivity of titanium and titanium silicid2025
Electrical contact cavity structure and methods of forming the same2025
Using doppler for multipath detection and mitigation in RF-based positioning2025
Methods for controlling contact resistance in cobalt-titanium structures2025
Methods for controlling contact resistance in cobalt-titanium structures2025
Method and apparatus for in motion initialization of global navigation satellite2025
Bayesian decomposition for mismatched performances in semiconductor equipment2025
Device for preparing rock speciments with different moisture contents2025
Process kit for a substrate support2025
Method of depositing metal films2025
Devices and techniques for improving reception or compensating for attenuation o2025