Top-port MEMS microphone and method of manufacturing the same

Assignee

• Tdk

Inventors

• Jan Tue Ravnkilde (17 patents)
• Marcel Giesen (8 patents)
• Kurt Rasmussen (15 patents)
• Morten Ginnerup (8 patents)
• Pirmin Hermann Otto Rombach (40 patents)
• Wolfgang Pahl (61 patents)
• Anton Leidl (31 patents)
• Armin Schober (7 patents)
• Jürgen Portmann (12 patents)

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