Microelectromechanical microphone with membrane trench reinforcements and method of fabrication

Assignee

• Tdk

Inventors

• Pirmin Hermann Otto Rombach (40 patents)
• Kurt Rasmussen (15 patents)
• Dennis Mortensen (16 patents)
• Cheng-Yen Liu (7 patents)
• Morten Ginnerup (8 patents)
• Jan Tue Ravnkilde (17 patents)
• Jotaro Akiyama (4 patents)

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