Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Atomic layer deposition of antimony oxide films

Atomic layer deposition of antimony oxide films

US Patent 10056249 · Granted Aug 21, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Selective passivation and selective deposition2025
Method and apparatus for forming a patterned structure on a substrate2025
Method of forming a vanadium nitride-containing layer2025
Method for forming an ultraviolet radiation responsive metal oxide-containing fi2025
Substrate processing apparatus and method for processing substrates2025
Transition metal nitride deposition method2025
Methods and systems for filling a gap2025
Method of forming a structure and system for same2025
Method and wafer processing furnace for forming an epitaxial stack of semiconduc2025
Transition metal deposition processes and deposition assembly2025
Deposition of oxides and nitrides2025
Method and wafer processing furnace for forming an epitaxial stack on a pluralit2025