{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Doping control of metal nitride films", "item": "https://www.patentleaderboard.com/patent/10008412"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Doping control of metal nitride films

Doping control of metal nitride films

US Patent 10008412 · Granted Jun 26, 2018

Estimated economic value: $35,949,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and apparatus for cleaning a vessel2025
Apparatus for providing a gas mixture to a reaction chamber and method of using 2025
Low resistivity metal contact stack2025
Weighted lift pin2025
Method and system for depositing molybdenum layers2025
Method of depositing metal films2025
Method for forming structures including transition metal layers2025
Method of forming vanadium nitride layer and structure including the vanadium ni2025
Methods and apparatus for processing a substrate2024
Low resistivity DRAM buried word line stack2024
Reactor system including a gas distribution assembly for use with activated spec2024
Organic photosensitive devices comprising aryl squaraines and methods of making 2024