| 7456960 |
Particle counter with improved image sensor array |
Dwight A. Sehler |
2008-11-25 |
| RE39783 |
Chemical mechanical planarization (CMP) slurry quality control process and particle size distribution measuring systems |
Scott Waisanen, Dennis J. Knowlton |
2007-08-21 |
| 7088446 |
Optical measurement of the chemical constituents of an opaque slurry |
— |
2006-08-08 |
| 7030980 |
Diode pumped intracavity laser particle counter with improved reliability and reduced noise |
Dwight A. Sehler |
2006-04-18 |
| 6903818 |
Low noise intracavity laser particle counter |
Dwight A. Sehler, Mark Lilly |
2005-06-07 |
| 6709311 |
Spectroscopic measurement of the chemical constituents of a CMP slurry |
— |
2004-03-23 |
| 6275290 |
Chemical mechanical planarization (CMP) slurry quality control process and particle size distribution measuring systems |
Scott Waisanen, Dennis J. Knowlton |
2001-08-14 |
| 6246474 |
Method and apparatus for measurement of particle size distribution in substantially opaque slurries |
Scott Waisanen |
2001-06-12 |
| 4874572 |
Method of and apparatus for measuring vapor density |
Loren D. Nelson |
1989-10-17 |