Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7026257 | Method of manufacturing low dielectric film by a vacuum ultraviolet chemical vapor deposition | Kiyohiko Toshikawa, Yoshikazu Motoyama, Yousuke Motokawa, Yusuke Yagi, Junichi Miyano +1 more | 2006-04-11 |
| 6624094 | Method of manufacturing an interlayer dielectric film using vacuum ultraviolet CVD with Xe2 excimer lamp and silicon atoms | Kiyohiko Toshikawa, Yoshikazu Motoyama, Yousuke Motokawa, Yusuke Yagi, Junichi Miyano +1 more | 2003-09-23 |