Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6860977 | Method for manufacturing a workpiece using a magnetron sputter source | Bernd Heinz, Martin Dubs, Thomas Eisenhammer, Pius Grunenfelder, Walter Haag +1 more | 2005-03-01 |
| 6821397 | Method for controlling plasma density or the distribution thereof | — | 2004-11-23 |
| 6682637 | Magnetron sputter source | Bernd Heinz, Martin Dubs, Thomas Eisenhammer, Pius Grunenfelder, Walter Haag +1 more | 2004-01-27 |
| 6679977 | Method of producing flat panels | Walter Haag, Pius Grunenfelder, Urs Schwendener, Markus Schlegel | 2004-01-20 |
| 6454920 | Magnetron sputtering source | Walter Haag, Pius Grunenfelder, Urs Schwendener, Markus Schlegel | 2002-09-24 |
| 6284106 | Method of producing flat panels | Walter Haag, Pius Grunenfelder, Urs Schwendener, Markus Schlegel | 2001-09-04 |
| 6093293 | Magnetron sputtering source | Walter Haag, Pius Grunenfelder, Urs Schwendener, Markus Schlegel | 2000-07-25 |