Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11620425 | Methods for modeling of a design in reticle enhancement technology | P. Jeffrey Ungar | 2023-04-04 |
| 11301610 | Methods for modeling of a design in reticle enhancement technology | P. Jeffrey Ungar | 2022-04-12 |
| 10381196 | Charged particle beam writing apparatus and method for calculating irradiation coefficient | — | 2019-08-13 |
| 10234493 | Wireless module, electronic module, and measuring method | Masahiro Yanagi, Kimihiro Maruyama, Tatsushi Shibuya | 2019-03-19 |
| 10074516 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2018-09-11 |
| 9947509 | Multiple charged particle beam lithography apparatus and multiple charged particle beam lithography method | — | 2018-04-17 |
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Shigehiro Hara, Kenichi Yasui, Hiroshi Yamashita, Yasuo Kato, Saori Gomi +4 more | 2017-10-03 |
| 9721756 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2017-08-01 |
| 9478391 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2016-10-25 |
| 9437396 | Multi charged particle beam writing apparatus, and multi charged particle beam writing method | — | 2016-09-06 |
| 9218942 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2015-12-22 |
| 9190246 | Multi charged particle beam writing apparatus, and multi charged particle beam writing method | — | 2015-11-17 |
| 9018602 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2015-04-28 |
| 8791432 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2014-07-29 |
| 8759799 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2014-06-24 |