Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716765 | Plasma clean for a semiconductor thin film deposition chamber | Edward Augustyniak, Jason Tian, Bart J. van Schravendijk | 2004-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716765 | Plasma clean for a semiconductor thin film deposition chamber | Edward Augustyniak, Jason Tian, Bart J. van Schravendijk | 2004-04-06 |