Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497796 | Apparatus and method for controlling plasma uniformity across a substrate | Kaihan Ashtiani, Karl B. Levy, Kwok Fai Lai, Larry D. Hartsough | 2002-12-24 |
| 6444105 | Physical vapor deposition reactor including magnet to control flow of ions | Kwok Fai Lai, Kaihan Ashtiani, Larry D. Hartsough, Karl B. Levy | 2002-09-03 |
| 6193854 | Apparatus and method for controlling erosion profile in hollow cathode magnetron sputter source | Kwok Fai Lai, Larry D. Hartsough, Kaihan Ashtiani, Karl B. Levy, Maximilian A. Biberger | 2001-02-27 |
| 6179973 | Apparatus and method for controlling plasma uniformity across a substrate | Kwok Fai Lai, Kaihan Ashtiani, Larry D. Hartsough, Karl B. Levy | 2001-01-30 |
| 4688009 | Triple-pane waveguide window | Patrick Edward Ferguson | 1987-08-18 |