Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7525634 | Monitoring apparatus and method particularly useful in photolithographically | Giora Dishon, Moshe Finarov, Zvi Nirel | 2009-04-28 |
| 7327476 | Thin films measurement method and system | Moshe Finarov, Klara Vinokur | 2008-02-05 |
| 7289190 | Monitoring apparatus and method particularly useful in photolithographically | Giora Dishon, Moshe Finarov, Zvi Nirel | 2007-10-30 |
| 7030957 | Monitoring apparatus and method particularly useful in photolithographically processing substrates | Giora Dishon, Moshe Finarov, Zvi Nirel | 2006-04-18 |
| 6842220 | Monitoring apparatus and method particularly useful in photolithographically processing substrates | Giora Dishon, Moshe Finarov, Zvi Nirel | 2005-01-11 |
| 6720568 | Method and system for optical inspection of a structure formed with a surface relief | Moshe Finarov | 2004-04-13 |
| 6704920 | Process control for micro-lithography | Boaz Brill | 2004-03-09 |
| 6643017 | Method and system for controlling the photolithography process | Moshe Finarov | 2003-11-04 |
| 6424417 | Method and system for controlling the photolithography process | Moshe Finarov | 2002-07-23 |
| 6166801 | Monitoring apparatus and method particularly useful in photolithographically processing substrates | Giora Dishon, Moshe Finarov, Zvi Nirel | 2000-12-26 |