Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981573 | Reflective mask blank, reflective mask and methods of producing the mask blank and the mask | Shinichi Ishibashi, Tsutomu Shoki, Morio Hosoya, Mitsuhiro Kureishi | 2011-07-19 |
| 7955762 | Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film | Osamu Nozawa | 2011-06-07 |
| 7651823 | Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive film | Osamu Nozawa | 2010-01-26 |
| 7390596 | Reflection type mask blank and reflection type mask and production methods for them | Shinichi Ishibashi, Tsutomu Shoki, Morio Hosoya, Mitsuhiro Kureishi | 2008-06-24 |
| 7060394 | Halftone phase-shift mask blank and halftone phase-shift mask | Osamu Nozawa, Hideaki Mitsui | 2006-06-13 |
| 7011910 | Halftone-type phase-shift mask blank, and halftone-type phase-shift mask | Osamu Nozawa, Hideaki Mitsui, Ryo Ohkubo | 2006-03-14 |
| 6743553 | Halftone phase shift mask and mask blank | Osamu Nozawa | 2004-06-01 |