Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7132732 | Semiconductor device having two distinct sioch layers | Tatsuya Usami, Noboru Morita, Sadayuki Ohnishi, Koji Arita, Ryohei Kitao +1 more | 2006-11-07 |
| 7119441 | Semiconductor interconnect structure | Takayuki Matsui | 2006-10-10 |
| 7074698 | Method of fabricating semiconductor device using plasma-enhanced CVD | Noboru Morita, Tatsuya Usami, Sadayuki Ohnishi, Koji Arita, Ryohei Kitao +1 more | 2006-07-11 |
| 6879042 | Semiconductor device and method and apparatus for manufacturing the same | Takayuki Matsui | 2005-04-12 |
| 6787480 | Manufacturing method of semicondcutor device | Hidemitsu Aoki, Hiroaki Tomimori, Norio Okada, Tatsuya Usami, Takamasa Tanikuni | 2004-09-07 |
| 6335277 | Method for forming metal nitride film | — | 2002-01-01 |