Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197124 | Lithography measurement machine and operating method thereof | — | 2025-01-14 |
| 8831333 | Mask pattern analysis apparatus and method for analyzing mask pattern | — | 2014-09-09 |
| 8533638 | Post-optical proximity correction photoresist pattern collapse rule | Yi-Nan Chen, Hsien-Wen Liu | 2013-09-10 |
| 8497568 | Monitoring pattern, and pattern stitch monitoring method and wafer therewith | Yi-Nan Chen, Hsien-Wen Liu | 2013-07-30 |
| 8192902 | Replaced photomask | — | 2012-06-05 |
| 7984392 | Matching method for designing layout patterns on a photomask from inverse lithography | — | 2011-07-19 |
| 7811723 | Phase-shift mask and method for forming a pattern | Yuan-Hsun Wu, Ya-Chih Wang | 2010-10-12 |
| 7452639 | Photomask with photoresist test patterns and pattern inspection method | — | 2008-11-18 |