Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466463 | Charged particle beam substrate inspection using both vector and raster scanning | Kevin M. Monahan, Enden David Liu, Cong Tran, Theodore A. Prescop | 2016-10-11 |
| 9466464 | Precision substrate material removal using miniature-column charged particle beam arrays | Kevin M. Monahan, Michael C. Smayling, Theodore A. Prescop | 2016-10-11 |
| 9453281 | Precision deposition using miniature-column charged particle beam arrays | Theodore A. Prescop, Kevin M. Monahan, Michael C. Smayling | 2016-09-27 |
| 9207539 | Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems | Kevin M. Monahan, Theodore A. Prescop, Cong Tran | 2015-12-08 |
| 9210053 | System and method for management of network monitoring information | Yuling Chen, Bingjun Li, Weijun Li, Julie Shur-Meih Hsu | 2015-12-08 |
| 9184027 | Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp | Kevin M. Monahan, Theodore A. Prescop, Cong Tran | 2015-11-10 |
| 8999628 | Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems | Kevin M. Monahan, Theodore A. Prescop, Cong Tran | 2015-04-07 |
| 8999627 | Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp | Kevin M. Monahan, Theodore A. Prescop, Cong Tran | 2015-04-07 |
| 6804310 | Decision feedback loop apparatus and method for channel estimation and de-rotation using burst pilot bits | Xiao Bo Li, Huoy-Bing Lim | 2004-10-12 |