Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9463976 | MEMS fabrication process with two cavities operating at different pressures | Robert F. Steimle | 2016-10-11 |
| 9061885 | Cavity based packaging for MEMS devices | Lisa H. Karlin, Lianjun Liu, Alex P. Pamatat | 2015-06-23 |
| 8551814 | Method of fabricating a semiconductor device that limits damage to elements of the semiconductor device that are exposed during processing | Lisa H. Karlin, Lianjun Liu, Alex P. Pamatat | 2013-10-08 |
| 5707492 | Metallized pad polishing process | Charles Stager, Thomas S. Kobayashi, Joseph E. Page, Jr., Mark A. Zaleski | 1998-01-13 |
| 5478436 | Selective cleaning process for fabricating a semiconductor device | Mark A. Zaleski, Troy B. Morrison, Jeffrey Sultemeier | 1995-12-26 |
| 5433650 | Method for polishing a substrate | — | 1995-07-18 |
| 5372673 | Method for processing a layer of material while using insitu monitoring and control | Charles Stager, Gregory S. Ferguson, Christopher A. Turman | 1994-12-13 |
| 5175124 | Process for fabricating a semiconductor device using re-ionized rinse water | — | 1992-12-29 |