Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902986 | Method for defining alignment marks in a semiconductor wafer | Alain Charles, Karl Mautz, Joseph Petrucci | 2005-06-07 |
| 6895294 | Assembly comprising a plurality of mask containers, manufacturing system for manufacturing semiconductor devices, and method | Karl Mautz, Alain Charles, Ralf Schuster | 2005-05-17 |
| 6817602 | Manufacturing system method for processing a lithography mask container | Alain Charles, Karl Mautz | 2004-11-16 |
| 6744494 | Continuously adjustable neutral density area filter | Karl Mautz, Alain Charles | 2004-06-01 |
| 6737205 | Arrangement and method for transferring a pattern from a mask to a wafer | Alain Charles, Karl Mautz | 2004-05-18 |
| 6686254 | Semiconductor structure and method for reducing charge damage | Joseph Petrucci, Karl Mautz, Alain Charles | 2004-02-03 |
| 6650135 | Measurement chuck having piezoelectric elements and method | Karl Mautz, Alain Charles | 2003-11-18 |
| 6620563 | Lithography method for forming semiconductor devices on a wafer utilizing atomic force microscopy | Alain Charles, Karl Mautz | 2003-09-16 |
| 6589099 | Method for chemical mechanical polishing (CMP) with altering the concentration of oxidizing agent in slurry | David Weston Haggart, Jr., Karl Mautz | 2003-07-08 |
| 6495802 | Temperature-controlled chuck and method for controlling the temperature of a substantially flat object | Alain Charles, Karl Mautz | 2002-12-17 |
| 6491451 | Wafer processing equipment and method for processing wafers | Timothy Stanley | 2002-12-10 |
| 6486049 | Method of fabricating semiconductor devices with contact studs formed without major polishing defects | Hans Zeindl | 2002-11-26 |
| 6420247 | Method of forming structures on a semiconductor including doping profiles using thickness of photoresist | Alain Charles | 2002-07-16 |
| 6313567 | Lithography chuck having piezoelectric elements, and method | Alain Charles, Karl Mautz | 2001-11-06 |
| 5786237 | Method for forming a monolithic electronic module by stacking planar arrays of integrated circuit chips | Martha Ashley Clark Cockerill, Loretta J. O'Connor, Steven H. Voldman | 1998-07-28 |
| 5637912 | Three-dimensional monolithic electronic module having stacked planar arrays of integrated circuit chips | Martha Ashley Clark Cockerill, Loretta J. O'Connor, Steven H. Voldman | 1997-06-10 |