Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6469341 | Method and device for producing undercut gate for flash memory | Kuo-Tung Sung | 2002-10-22 |
| 6399509 | Defects reduction for a metal etcher | Hung Yueh Lu, Hong-Long Chang | 2002-06-04 |
| 6379491 | Plasma chamber with erosion resistive securement screws | Te-Hsun Pang, Tonny Shu, Birdson Lee | 2002-04-30 |
| 6306772 | Deep trench bottle-shaped etching using Cl2 gas | Ming-Horng Lin, Nien-Yu Tsai | 2001-10-23 |
| 6166898 | Plasma chamber wafer clamping ring with erosion resistive tips | Mu-Tsun Ting, Jen-Hui Hsiao, Troy Chen | 2000-12-26 |
| 6136653 | Method and device for producing undercut gate for flash memory | Kuo-Tung Sung | 2000-10-24 |
| 6106664 | Clamp for affixing a wafer in an etching chamber | Shih-Po Lin, Jim Ho, Ming-Hong Lin | 2000-08-22 |
| 6071823 | Deep trench bottle-shaped etch in centura mark II NG | Lin Ming Hung, Nien-Yu Tsai, Pao-Chu Chang | 2000-06-06 |
| 5965462 | Method for forming a gate structure used in borderless contact etching | Wen Yi Tan, Marlon Tsai | 1999-10-12 |