Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6166898 | Plasma chamber wafer clamping ring with erosion resistive tips | Ray C. Lee, Mu-Tsun Ting, Troy Chen | 2000-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6166898 | Plasma chamber wafer clamping ring with erosion resistive tips | Ray C. Lee, Mu-Tsun Ting, Troy Chen | 2000-12-26 |