Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7004012 | Method of estimating thickness of oxide layer | Yung Nan Liu, Cheng Kuo Tsou, Yuh Ju Lee | 2006-02-28 |
| 6880382 | Leakage detecting method for use in oxidizing system of forming oxide layer | Yung Nan Liu, Cheng Kuo Tsou, Yuh Ju Lee | 2005-04-19 |
| 6492248 | Few-particle-induced low-pressure TEOS process | Jen-Chieh Chang, Yi-Fu Chung, Pei-Feng Sun | 2002-12-10 |
| 6147013 | Method of LPCVD silicon nitride deposition | Pei-Feng Sun, Chien-Hung Chen, May-Jane Chen | 2000-11-14 |